Area-selective Atomic Layer Deposition & Laser Induced MaterialsProcessing in Advanced Micro- & Nanopatterning

15:00 Uhr - 16:00 Uhr 
Dr. Pedro Deminsky 
Linkoping University, Linkoping, Sweden 
Materialien: Supraleiter, Magnetwerkstoffe, Nanostrukturen
Physik: Condensierte Materie (incl. Soft, Festkörper)
Ines Firlle 

Micro and nanoscale film patterning and nanostructures growth are an essential parts of modern microelectronics industry. As device scaling proceeds toward sub-10 nm era where process tolerances become atomic-scale, the adoption of alternative nanoscale process integration schemes become critical for novel device concepts. Area-selective atomic layer deposition (AS-ALD) has attracted immense attention in recent years for self-aligned accurate pattern placement with subnanometer thickness control. From another prospective, laser induced periodic surface structuring is another low-cost and high-speed method for the creation of periodic nanostructures with femtosecond pulses.
In this talk, after a brief overview of area-selective atomic layer deposition, I will present a methodology to achieve AS-ALD by using inductively couple plasma grown fluorocarbon polymer, PMMA and PVP films (as hydrophobic blocking layer materials), and graphene (as a lift-off material). Our approach has been tested for noble metals (Pt, Pd), metal-oxides (TiO2, ZnO, Al2O3, HfO2), and III-Nitride materials (AlN, InN) using thermal and plasma-enhanced ALD processes. Then I will continue with laser-induced periodic materials processing in femtosecond mode regime and will describe its impact on surface micro- & nanopatterning. I will then move to area-selective laser-material processing and will present our accomplishment of developing superhydrophobic/superhydrophilic interfaces for wettability applications. Finally, I will discuss necessity of extending the already existing methods for selective materials deposition/processing and will describe the future directions of the development of efficient and convenient AS-ALD processes.


Letzte Aktualisierung: 11.12.2018 00:06.


Leibniz Institut für Festkörper- und Werkstoffforschung Dresden (B3E.26, IFW Dresden) 
Helmholtzstraße 20
01069 Dresden


Leibniz Institut für Festkörper- und Werkstoffforschung Dresden (IFW)
Helmholtzstraße 20
01069 Dresden
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